准分子激光皮肤治疗仪能量稳定性研究

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	准分子激光皮肤治疗仪能量稳定性研究
其他题名	Study on energy stability for excimer laser skin therapeutic apparatus
	赵读亮 1; 李文洁 1; 梁勖1 ; 方晓东1
	2017
发表期刊	红外与激光工程
ISSN	1007-2276
摘要	为了满足308nm准分子激光皮肤治疗仪对激光输出参数，特别是激光能量稳定性的要求，首先建立了激光能量衰减模型，提出了基于激励电压补偿能量的比例积分（PU算法，对PI算法进行了理论分析、模拟实现；其次对准分子激光器进行了实验研究，设计了高压激励电源和基于快速光电二极管的激光能量无损检测模块，实验研究了激励电压与输出能量的关系、激光器能量衰减特性以及引入PI算法后的激光器能量稳定特性；结果表明：激励电源和能量检测模块满足PI算法的调节精度和响应速度，引入PI算法后，准分子激光器输出能量在1千万个脉冲内仍能维持目标能量17．5mJ附近，能量方差从0．2％缓慢上升至3％，满足准分子激光皮肤治疗仪的使用需求。
其他摘要	In order to meet output parameters, especially the stability of the laser energy requirements for the 308 nm skin therapeutic apparatus, first of all, the laser energy attenuation model and proportional integral （PI） algorithm based on energy compensation by the excitation voltage were established, its theoretical analysis and simulation were compeleted. Secondly, the experimental research on excimer laser was carded out which included high voltage excitation power supply and laser energy detection module based on fast nondestructive photoelectric diode. Meanwhile, the experimental research on the relationship between excitation voltage and output power, characteristics of laser energy attenuation and laser energy stability properties with the introduction of PI algorithm was studied. The results show that the power supply and energy detection module meet the PI algorithm control precision and response speed. Meanwhile, the excimer laser output energy can still maintain a target energy within 17.5 ml and energy variance is slowly rising from 0,2% to 3% in the 10 million pulses after introducing the PI algorithm, which well meets the usage requirements of excimer laser skin therapeutic apparatus.
关键词	能量稳定性准分子激光器激励电源比例积分算法
收录类别	CSCD
语种	中文
CSCD记录号	CSCD:6202455
引用统计	被引频次：2[CSCD] [CSCD记录]
文献类型	期刊论文
条目标识符	http://ir.hfcas.ac.cn:8080/handle/334002/100365
专题	中国科学院合肥物质科学研究院
作者单位	1.中国科学院安徽光学精密机械研究所 2.中国科学院安徽光学精密机械研究所 3.中国科学院安徽光学精密机械研究所 4.中国科学院安徽光学精密机械研究所
推荐引用方式 GB/T 7714	赵读亮,李文洁,梁勖,等. 准分子激光皮肤治疗仪能量稳定性研究[J]. 红外与激光工程,2017,046.
APA	赵读亮,李文洁,梁勖,&方晓东.(2017).准分子激光皮肤治疗仪能量稳定性研究.红外与激光工程,046.
MLA	赵读亮,et al."准分子激光皮肤治疗仪能量稳定性研究".红外与激光工程 046(2017).