Knowledge Management System of Hefei Institute of Physical Science,CAS
Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering | |
Sun, Li1; Ruan, Ting1; Yuan, Zhigang2; Fang, Qianfeng3; Gong, Wenbang1; Wu, Xiao2; Mei, Shunqi1 | |
2020-07-01 | |
发表期刊 | VACUUM |
ISSN | 0042-207X |
通讯作者 | Yuan, Zhigang(yuanzhigang@wtu.edu.cn) |
摘要 | In order to investigate the microstructures and properties of Mo2N + MoS2 coatings, MoS2, Mo2N and Mo2N + MoS2 coatings were deposited by direct current magnetron sputtering. The crystalline structure, surface and cross-sectional morphology, hardness and friction coefficient are characterized by X-ray diffraction, field emission scanning electron microscopy, nanoindentation and sliding tester, respectively. The results indicate that the Mo2N + MoS2 composite coatings are composed of Mo2N and MoS2 phases, but the (002) crystalline orientation of MoS2 phase is not detected in the composite coatings. The composite coatings display fine and compact columnar layer structure. The hardness and friction coefficient of composite coatings are about 17 GPa and 0.4, respectively. Compared with pure MoS2 or Mo2N, the overall performance of composite coatings is improved, which is attributed to the change of coating microstructures. |
关键词 | Mo2N+MoS2 coating Magnetron sputtering X-ray diffraction Hardness Friction coefficient |
DOI | 10.1016/j.vacuum.2020.109406 |
关键词[WOS] | COMPOSITE COATINGS ; TRIBOLOGICAL PROPERTIES ; WEAR BEHAVIOR ; FILMS ; ORIENTATION ; SYSTEMS ; GROWTH ; DRY |
收录类别 | SCI |
语种 | 英语 |
资助项目 | National Natural Science Foundation of China[11904268] ; Department of Science and Technology, Hubei Provincial People's Government[2019CFB613] |
项目资助者 | National Natural Science Foundation of China ; Department of Science and Technology, Hubei Provincial People's Government |
WOS研究方向 | Materials Science ; Physics |
WOS类目 | Materials Science, Multidisciplinary ; Physics, Applied |
WOS记录号 | WOS:000538148400052 |
出版者 | PERGAMON-ELSEVIER SCIENCE LTD |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.hfcas.ac.cn:8080/handle/334002/103086 |
专题 | 中国科学院合肥物质科学研究院 |
通讯作者 | Yuan, Zhigang |
作者单位 | 1.Wuhan Text Univ, Hubei Key Lab Digital Text Equipment, Wuhan 430073, Peoples R China 2.Wuhan Text Univ, Sch Mech Engn & Automat, Wuhan 430073, Peoples R China 3.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Hefei 230031, Peoples R China |
推荐引用方式 GB/T 7714 | Sun, Li,Ruan, Ting,Yuan, Zhigang,et al. Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering[J]. VACUUM,2020,177. |
APA | Sun, Li.,Ruan, Ting.,Yuan, Zhigang.,Fang, Qianfeng.,Gong, Wenbang.,...&Mei, Shunqi.(2020).Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering.VACUUM,177. |
MLA | Sun, Li,et al."Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering".VACUUM 177(2020). |
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