Fully Integrated Photoacoustic NO2 Sensor for Sub-ppb Level Measurement

doi:10.3390/s20051270

HFCAS OpenIR

	Fully Integrated Photoacoustic NO2 Sensor for Sub-ppb Level Measurement
	Dong, Yang 1,2; Gu, Mingsi 1,2; Zhu, Gongdong 1; Tan, Tu1 ; Liu, Kun1 ; Gao, Xiaoming1
	2020-03-01
发表期刊	SENSORS
通讯作者	Gao, Xiaoming(xmgao@aiofm.ac.cn)
摘要	A fully integrated photoacoustic nitrogen dioxide (NO2) sensor is developed and demonstrated. In this sensor, an embedded photoacoustic cell was manufactured by using an up-to-date 3D printing technique. A blue laser diode was used as a light source for excitation of photoacoustic wave in the photoacoustic cell. The photoacoustic wave is detected by a sensitive microelectromechanical system (MEMS) microphone. Homemade circuits are integrated into the sensor for laser diode driving and signal processing. The sensor was calibrated by using a chemiluminescence NO-NO2-NOX gas analyzer. And the performance of this sensor was evaluated. The linear relationship between photoacoustic signals and NO2 concentrations was verified in a range of below 202 ppb. The limit of detection was determined to 0.86 ppb with an integration time of 1 s. The corresponding normalized noise equivalent absorption was 2.0 x 10(-8) cm(-1).W.Hz(-1/2). The stability and the optimal integration time were evaluated with an Allan deviation analysis, from which a detection limit of 0.25 ppb at the optimal integration time of 240 s was obtained. The sensor was used to measure outdoor air and the results agree with that obtained from the NO-NO2-NOX gas analyzer. The low-cost and portable photoacoustic NO2 sensor has a potential application for atmospheric NO2 monitoring.
关键词	nitrogen dioxide photoacoustic spectroscopy integrated sensor detection limit
DOI	10.3390/s20051270
关键词[WOS]	NITROGEN-DIOXIDE ; SPECTROSCOPY ; DIODE ; RANGE ; LOCK
收录类别	SCI
语种	英语
资助项目	National Key R&D Program of China[2016YFC0303900] ; National Key R&D Program of China[2017YFC0209700] ; National Natural Science Foundation of China[41475023] ; National Natural Science Foundation of China[41730103] ; National Natural Science Foundation of China[41575030]
项目资助者	National Key R&D Program of China ; National Natural Science Foundation of China
WOS研究方向	Chemistry ; Engineering ; Instruments & Instrumentation
WOS类目	Chemistry, Analytical ; Engineering, Electrical & Electronic ; Instruments & Instrumentation
WOS记录号	WOS:000525271500032
出版者	MDPI
引用统计	被引频次：10[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.hfcas.ac.cn:8080/handle/334002/103710
专题	中国科学院合肥物质科学研究院
通讯作者	Gao, Xiaoming
作者单位	1.Chinese Acad Sci, Anhui Inst Opt & Fine Mech, Hefei 230031, Peoples R China 2.Univ Sci & Technol China, Sci Isl Branch, Grad Sch, Hefei 230026, Peoples R China
第一作者单位	中科院安徽光学精密机械研究所
通讯作者单位	中科院安徽光学精密机械研究所
推荐引用方式 GB/T 7714	Dong, Yang,Gu, Mingsi,Zhu, Gongdong,et al. Fully Integrated Photoacoustic NO2 Sensor for Sub-ppb Level Measurement[J]. SENSORS,2020,20.
APA	Dong, Yang,Gu, Mingsi,Zhu, Gongdong,Tan, Tu,Liu, Kun,&Gao, Xiaoming.(2020).Fully Integrated Photoacoustic NO2 Sensor for Sub-ppb Level Measurement.SENSORS,20.
MLA	Dong, Yang,et al."Fully Integrated Photoacoustic NO2 Sensor for Sub-ppb Level Measurement".SENSORS 20(2020).