Knowledge Management System of Hefei Institute of Physical Science,CAS
Fully Integrated Photoacoustic NO2 Sensor for Sub-ppb Level Measurement | |
Dong, Yang1,2; Gu, Mingsi1,2; Zhu, Gongdong1; Tan, Tu1; Liu, Kun1; Gao, Xiaoming1 | |
2020-03-01 | |
发表期刊 | SENSORS |
通讯作者 | Gao, Xiaoming(xmgao@aiofm.ac.cn) |
摘要 | A fully integrated photoacoustic nitrogen dioxide (NO2) sensor is developed and demonstrated. In this sensor, an embedded photoacoustic cell was manufactured by using an up-to-date 3D printing technique. A blue laser diode was used as a light source for excitation of photoacoustic wave in the photoacoustic cell. The photoacoustic wave is detected by a sensitive microelectromechanical system (MEMS) microphone. Homemade circuits are integrated into the sensor for laser diode driving and signal processing. The sensor was calibrated by using a chemiluminescence NO-NO2-NOX gas analyzer. And the performance of this sensor was evaluated. The linear relationship between photoacoustic signals and NO2 concentrations was verified in a range of below 202 ppb. The limit of detection was determined to 0.86 ppb with an integration time of 1 s. The corresponding normalized noise equivalent absorption was 2.0 x 10(-8) cm(-1).W.Hz(-1/2). The stability and the optimal integration time were evaluated with an Allan deviation analysis, from which a detection limit of 0.25 ppb at the optimal integration time of 240 s was obtained. The sensor was used to measure outdoor air and the results agree with that obtained from the NO-NO2-NOX gas analyzer. The low-cost and portable photoacoustic NO2 sensor has a potential application for atmospheric NO2 monitoring. |
关键词 | nitrogen dioxide photoacoustic spectroscopy integrated sensor detection limit |
DOI | 10.3390/s20051270 |
关键词[WOS] | NITROGEN-DIOXIDE ; SPECTROSCOPY ; DIODE ; RANGE ; LOCK |
收录类别 | SCI |
语种 | 英语 |
资助项目 | National Key R&D Program of China[2016YFC0303900] ; National Key R&D Program of China[2017YFC0209700] ; National Natural Science Foundation of China[41475023] ; National Natural Science Foundation of China[41730103] ; National Natural Science Foundation of China[41575030] |
项目资助者 | National Key R&D Program of China ; National Natural Science Foundation of China |
WOS研究方向 | Chemistry ; Engineering ; Instruments & Instrumentation |
WOS类目 | Chemistry, Analytical ; Engineering, Electrical & Electronic ; Instruments & Instrumentation |
WOS记录号 | WOS:000525271500032 |
出版者 | MDPI |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.hfcas.ac.cn:8080/handle/334002/103710 |
专题 | 中国科学院合肥物质科学研究院 |
通讯作者 | Gao, Xiaoming |
作者单位 | 1.Chinese Acad Sci, Anhui Inst Opt & Fine Mech, Hefei 230031, Peoples R China 2.Univ Sci & Technol China, Sci Isl Branch, Grad Sch, Hefei 230026, Peoples R China |
第一作者单位 | 中科院安徽光学精密机械研究所 |
通讯作者单位 | 中科院安徽光学精密机械研究所 |
推荐引用方式 GB/T 7714 | Dong, Yang,Gu, Mingsi,Zhu, Gongdong,et al. Fully Integrated Photoacoustic NO2 Sensor for Sub-ppb Level Measurement[J]. SENSORS,2020,20. |
APA | Dong, Yang,Gu, Mingsi,Zhu, Gongdong,Tan, Tu,Liu, Kun,&Gao, Xiaoming.(2020).Fully Integrated Photoacoustic NO2 Sensor for Sub-ppb Level Measurement.SENSORS,20. |
MLA | Dong, Yang,et al."Fully Integrated Photoacoustic NO2 Sensor for Sub-ppb Level Measurement".SENSORS 20(2020). |
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