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A repeat positioning, scanning tunneling microscope based on a straight-push piezoelectric nanopositioner
Guo, Wenjing1; Wang, Jihao3; Xia, Zhigang1; Zhang, Jingjing2; Lu, Qingyou3,4
2021-08-01
发表期刊MEASUREMENT SCIENCE AND TECHNOLOGY
ISSN0957-0233
通讯作者Xia, Zhigang(zhgxia@mail.ustc.edu.cn) ; Zhang, Jingjing(jingbest@mail.ustc.edu.cn)
摘要In this paper, we develop a repeat positioning, scanning tunneling microscope (STM), whose core component is a new straight-push piezoelectric nanopositioner. The special rigid frame structure and straight-push stepping method of this nanopositioner ensure that there is no lateral deviation while it is stepping. It has a smaller volume and a lower driving voltage than that of traditional piezoelectric nanopositioners with the same load capacity. The test results show that its threshold voltage is only 4 V. Additionally, when the driving signal frequency is constant, its step size and the amplitude of the driving signal show a linear relationship. Moreover, when the driving signal amplitude is constant, the velocity and driving signal frequency of the nanopositioner also show a linear relationship. In addition, the small STM (diameter less than 10 mm, length less than 50 mm) designed on the basis of this nanopositioner can work at full low-voltage. The STM's high-resolution images and repeatable positioning performance are demonstrated in detail in this article. When the STM moves back and forth along the Z direction at a millimeter-scale distance, its positioning deviation in the same area of the sample is less than 30 nm. The capacity of the STM is very important for tracking and observing the different characteristics of some samples in different test conditions and is also significant for applications such as multi-tip collaborative work.
关键词STM repeatable positioning piezoelectric nanopositioner straight-push full low-voltage
DOI10.1088/1361-6501/abe8fb
关键词[WOS]STM ; SURFACE
收录类别SCI
语种英语
资助项目National Natural Science Foundation of China (NSFC)[11604319] ; Natural Sciences Fund of Zhejiang Province[LQ17B010003] ; Science and Technology on Sonar Laboratory[6142109KF201905]
项目资助者National Natural Science Foundation of China (NSFC) ; Natural Sciences Fund of Zhejiang Province ; Science and Technology on Sonar Laboratory
WOS研究方向Engineering ; Instruments & Instrumentation
WOS类目Engineering, Multidisciplinary ; Instruments & Instrumentation
WOS记录号WOS:000655763000001
出版者IOP PUBLISHING LTD
引用统计
文献类型期刊论文
条目标识符http://ir.hfcas.ac.cn:8080/handle/334002/122642
专题中国科学院合肥物质科学研究院
通讯作者Xia, Zhigang; Zhang, Jingjing
作者单位1.China Jiliang Univ CJLU, Coll Metrol & Measurement Engn, Hangzhou 310018, Peoples R China
2.China Jiliang Univ CJLU, Coll Mat & Chem, Hangzhou 310018, Peoples R China
3.Chinese Acad Sci, Anhui Prov Key Lab Condensed Matter Phys Extreme, High Field Magnet Lab, Hefei 230031, Anhui, Peoples R China
4.Univ Sci & Technol China, Hefei Natl Lab Phys Sci Microscale, Hefei 230026, Anhui, Peoples R China
推荐引用方式
GB/T 7714
Guo, Wenjing,Wang, Jihao,Xia, Zhigang,et al. A repeat positioning, scanning tunneling microscope based on a straight-push piezoelectric nanopositioner[J]. MEASUREMENT SCIENCE AND TECHNOLOGY,2021,32.
APA Guo, Wenjing,Wang, Jihao,Xia, Zhigang,Zhang, Jingjing,&Lu, Qingyou.(2021).A repeat positioning, scanning tunneling microscope based on a straight-push piezoelectric nanopositioner.MEASUREMENT SCIENCE AND TECHNOLOGY,32.
MLA Guo, Wenjing,et al."A repeat positioning, scanning tunneling microscope based on a straight-push piezoelectric nanopositioner".MEASUREMENT SCIENCE AND TECHNOLOGY 32(2021).
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