Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas

doi:10.1088/1361-6595/ac4d03

HFCAS OpenIR

	Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas
	Lim, Yegeon 1; Severn, Greg 2; Yip, Chi-Shung 3; Ghim, Y-C 1
	2022-02-01
发表期刊	PLASMA SOURCES SCIENCE & TECHNOLOGY
ISSN	0963-0252
通讯作者	Ghim, Y-C(ycghim@kaist.ac.kr)
摘要	For unmagnetized low temperature Ar plasmas with plasma density ranging from 3 x 10(8) to 10(10) cm(-3) and an electron temperature of similar to 1 eV, the expansion of the ion collecting area of a double-sided planar Langmuir probe with respect to probe bias is experimentally investigated, through a systematic scan of plasma parameters. In accordance with many existing numerical studies, the ion collecting area is found to follow a power law for a sufficiently negative probe bias. Within our experimental conditions, the power law coefficient and exponent have been parameterized as a function of the normalized probe radius and compared with numerical results where qualitatively comparable features are identified. However, numerical results underestimate the power law coefficient while the exponent is overestimated. Our experimental measurements also confirm that ion-neutral collisions play a role in determining the expanded ion collecting area, thus changing values of the power law coefficient and exponent. This work suggests that a power law fit to the ion collecting area must be performed solely based on experimentally obtained data rather than using empirical formulae from simulation results since material and cleanness of the probe, type of working gas, and neutral pressure may also affect the expansion of the ion collecting area, factors which are difficult to model in a numerical simulation. A proper scheme of analyzing an I-V characteristic of a Langmuir probe based on a power law fit is also presented.
关键词	planar Langmuir probe ion sheaths ion collecting area power law dependence
DOI	10.1088/1361-6595/ac4d03
关键词[WOS]	ELECTRON-DISTRIBUTION ; SHEATH
收录类别	SCI
语种	英语
资助项目	National R&D Program through the National Research Foundation of Korea (NRF) - Ministry of Science and ICT[NRF-2020M1A7A1A03016161] ; National R&D Program through the National Research Foundation of Korea (NRF) - Ministry of Science and ICT[NRF-2021R1A2C2005654] ; US National Science Foundation[NSF PHY-1804240] ; US National Science Foundation[NSF PHY-2108636] ; National Natural Science Foundation of China[11875285]
项目资助者	National R&D Program through the National Research Foundation of Korea (NRF) - Ministry of Science and ICT ; US National Science Foundation ; National Natural Science Foundation of China
WOS研究方向	Physics
WOS类目	Physics, Fluids & Plasmas
WOS记录号	WOS:000756998100001
出版者	IOP Publishing Ltd
引用统计	被引频次：7[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.hfcas.ac.cn:8080/handle/334002/127546
专题	中国科学院合肥物质科学研究院
通讯作者	Ghim, Y-C
作者单位	1.Korea Adv Inst Sci & Technol, Dept Nucl & Quantum Engn, Daejeon 34141, South Korea 2.Univ San Diego, Dept Phys & Biophys, San Diego, CA 92110 USA 3.Chinese Acad Sci, Inst Plasma Phys, Hefei Inst Phys Sci, Hefei 230031, Peoples R China
推荐引用方式 GB/T 7714	Lim, Yegeon,Severn, Greg,Yip, Chi-Shung,et al. Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas[J]. PLASMA SOURCES SCIENCE & TECHNOLOGY,2022,31.
APA	Lim, Yegeon,Severn, Greg,Yip, Chi-Shung,&Ghim, Y-C.(2022).Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas.PLASMA SOURCES SCIENCE & TECHNOLOGY,31.
MLA	Lim, Yegeon,et al."Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas".PLASMA SOURCES SCIENCE & TECHNOLOGY 31(2022).