Institutional Repository of Chinese Acad Sci, Inst Solid State Phys, Hefei 230031, Anhui, Peoples R China
Interfacial Control and Modulation of Band Alignment of Atomic Layer Deposition-Derived HfO2/Si Gate Stack by Rapid Thermal Annealing | |
H. H. Wei1; G. He1,2; M. Liu3; Y. M. Liu1; M. Zhang1; X. S. Chen2; Z. Q. Sun1 | |
2014 | |
发表期刊 | SCIENCE OF ADVANCED MATERIALS |
WOS记录号 | WOS:000348711900009 |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.hfcas.ac.cn:8080/handle/334002/20765 |
专题 | 中科院固体物理研究所 |
作者单位 | 1.School of Physics and Materials Science, Radiation Detection Materials and Devices Lab, Anhui University, Hefei 230601, China 2.National Laboratory for Infrared Physics, Chinese Academy of Sciences, Shanghai Institute of Technical Physics, 500 Yutian Road, Shanghai 200083, China 3.Key Laboratory of Materials Physics, Anhui Key Laboratory of Nanomaterials and Nanostructure, Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031, China |
推荐引用方式 GB/T 7714 | H. H. Wei,G. He,M. Liu,et al. Interfacial Control and Modulation of Band Alignment of Atomic Layer Deposition-Derived HfO2/Si Gate Stack by Rapid Thermal Annealing[J]. SCIENCE OF ADVANCED MATERIALS,2014,6(12):2652-2658. |
APA | H. H. Wei.,G. He.,M. Liu.,Y. M. Liu.,M. Zhang.,...&Z. Q. Sun.(2014).Interfacial Control and Modulation of Band Alignment of Atomic Layer Deposition-Derived HfO2/Si Gate Stack by Rapid Thermal Annealing.SCIENCE OF ADVANCED MATERIALS,6(12),2652-2658. |
MLA | H. H. Wei,et al."Interfacial Control and Modulation of Band Alignment of Atomic Layer Deposition-Derived HfO2/Si Gate Stack by Rapid Thermal Annealing".SCIENCE OF ADVANCED MATERIALS 6.12(2014):2652-2658. |
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