Institutional Repository of Chinese Acad Sci, Inst Solid State Phys, Hefei 230031, Anhui, Peoples R China
Effect of microscope parameter and specimen thickness of spatial resolution of transmission electron backscatter diffraction | |
Wang, Y. Z.1; Kong, M. G.2; Liu, Z. W.1; Lin, C. C.1; Zeng, Y.1 | |
2016-10-01 | |
发表期刊 | JOURNAL OF MICROSCOPY |
摘要 | The spatial resolution of transmission electron backscatter diffraction (t-EBSD) with a standard conventional EBSD detector was evaluated quantitatively based on the calculation of the correlation coefficient of transmission patterns which were acquired across a twin boundary in the sample of austenitic steel. The results showed that the resolution of t-EBSD improved from tens of nanometres to below 10 nm with increasing accelerating voltage and thinning of specimen thickness. High voltage could enhance the penetration depth and reduce the scattering angle. And the thinning of specimen thickness would result in decreasing of the scattering events according to the theory of thermal diffuse scattering (TDS). In addition, the transmission patterns were found to be weak and noisy if the specimen was too thin, because of the decreasing intensity detected by the screen. Consequently, in this work, the best spatial resolution of 7 nm was achieved at 30 kV and 41 nm thickness. Moreover, the specimen thickness range was also discussed using Monte-Carlo simulation. This approach was helpful to account for the differences of measured spatial resolutions, by t-EBSD, of lamellas with different thickness. |
文章类型 | Article |
关键词 | Correlation Coefficient Spatial Resolution Transmission Electron Backscatter Diffraction |
WOS标题词 | Science & Technology ; Technology |
DOI | 10.1111/jmi.12413 |
关键词[WOS] | KIKUCHI DIFFRACTION ; EBSD ; PATTERNS |
收录类别 | SCI |
语种 | 英语 |
项目资助者 | Research Project Fund of the International Science & Technology Cooperation Project of China(2013DFG52290) ; Research Project Fund of the International Science & Technology Cooperation Project of China(2013DFG52290) ; Research Project Fund of the International Science & Technology Cooperation Project of China(2013DFG52290) ; Research Project Fund of the International Science & Technology Cooperation Project of China(2013DFG52290) |
WOS研究方向 | Microscopy |
WOS类目 | Microscopy |
WOS记录号 | WOS:000383539300005 |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.hfcas.ac.cn:8080/handle/334002/24085 |
专题 | 中科院固体物理研究所 |
作者单位 | 1.Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, 1295 Dingxi Rd, Shanghai, Peoples R China 2.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Hefei, Anhui, Peoples R China |
推荐引用方式 GB/T 7714 | Wang, Y. Z.,Kong, M. G.,Liu, Z. W.,et al. Effect of microscope parameter and specimen thickness of spatial resolution of transmission electron backscatter diffraction[J]. JOURNAL OF MICROSCOPY,2016,264(1):34-40. |
APA | Wang, Y. Z.,Kong, M. G.,Liu, Z. W.,Lin, C. C.,&Zeng, Y..(2016).Effect of microscope parameter and specimen thickness of spatial resolution of transmission electron backscatter diffraction.JOURNAL OF MICROSCOPY,264(1),34-40. |
MLA | Wang, Y. Z.,et al."Effect of microscope parameter and specimen thickness of spatial resolution of transmission electron backscatter diffraction".JOURNAL OF MICROSCOPY 264.1(2016):34-40. |
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