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Safe growth of graphene from non-flammable gas mixtures via chemical vapor deposition
Feng, Ying1,2; Trainer, Daniel J.1; Peng, Hongshang3; Liu, Ye4; Chen, Ke1
2017-03-01
发表期刊JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
摘要Chemical vapor deposition has emerged as the most promising technique for the growth of graphene. However, most reports of this technique use either flammable or explosive gases, which bring safety concerns and extra costs to manage risk factors. In this article, we demonstrate that continuous monolayer graphene can be synthesized via chemical vapor deposition technique on Cu foils using industrially safe gas mixtures. Important factors, including the appropriate ratio of hydrogen flow and carbon precursor, pressure, and growth time are considered to obtain graphene films. Optical measurements and electrical transport measurements indicate graphene films are with comparable quality to other reports. Such continuous large area graphene can be synthesized under non-flammable and non-explosive conditions, which opens a safe and economical method for mass production of graphene. It is thereby beneficial for integration of graphene into semiconductor electronics. Copyright (C) 2017, The editorial office of Journal of Materials Science & Technology. Published by Elsevier Limited.
文章类型Article
关键词Graphene Safe Growth Non-flammable Chemical Vapor Deposition (Cvd) Contact Resistance Transfer Length Method
WOS标题词Science & Technology ; Technology
DOI10.1016/j.jmst.2016.09.024
关键词[WOS]FIELD-EFFECT TRANSISTORS ; CARBON ; RESISTANCE ; DEVICES
收录类别SCI
语种英语
WOS研究方向Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
WOS记录号WOS:000396353000012
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被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.hfcas.ac.cn:8080/handle/334002/31793
专题中科院安徽光学精密机械研究所
作者单位1.Temple Univ, Dept Phys, Philadelphia, PA 19122 USA
2.Temple Univ, Dept Elect & Comp Engn, Philadelphia, PA 19122 USA
3.Minzu Univ China, Coll Sci, Beijing 100044, Peoples R China
4.Chinese Acad Sci, Anhui Inst Opt & Fine Mech, Anhui Prov Key Lab Photon Devices & Mat, Hefei 230031, Peoples R China
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GB/T 7714
Feng, Ying,Trainer, Daniel J.,Peng, Hongshang,et al. Safe growth of graphene from non-flammable gas mixtures via chemical vapor deposition[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2017,33(3):285-290.
APA Feng, Ying,Trainer, Daniel J.,Peng, Hongshang,Liu, Ye,&Chen, Ke.(2017).Safe growth of graphene from non-flammable gas mixtures via chemical vapor deposition.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,33(3),285-290.
MLA Feng, Ying,et al."Safe growth of graphene from non-flammable gas mixtures via chemical vapor deposition".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 33.3(2017):285-290.
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