Institutional Repository of Anhui Institute of Optics and Fine Mechanics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei, Anhui 230031, China
Safe growth of graphene from non-flammable gas mixtures via chemical vapor deposition | |
Feng, Ying1,2; Trainer, Daniel J.1; Peng, Hongshang3; Liu, Ye4; Chen, Ke1 | |
2017-03-01 | |
发表期刊 | JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY |
摘要 | Chemical vapor deposition has emerged as the most promising technique for the growth of graphene. However, most reports of this technique use either flammable or explosive gases, which bring safety concerns and extra costs to manage risk factors. In this article, we demonstrate that continuous monolayer graphene can be synthesized via chemical vapor deposition technique on Cu foils using industrially safe gas mixtures. Important factors, including the appropriate ratio of hydrogen flow and carbon precursor, pressure, and growth time are considered to obtain graphene films. Optical measurements and electrical transport measurements indicate graphene films are with comparable quality to other reports. Such continuous large area graphene can be synthesized under non-flammable and non-explosive conditions, which opens a safe and economical method for mass production of graphene. It is thereby beneficial for integration of graphene into semiconductor electronics. Copyright (C) 2017, The editorial office of Journal of Materials Science & Technology. Published by Elsevier Limited. |
文章类型 | Article |
关键词 | Graphene Safe Growth Non-flammable Chemical Vapor Deposition (Cvd) Contact Resistance Transfer Length Method |
WOS标题词 | Science & Technology ; Technology |
DOI | 10.1016/j.jmst.2016.09.024 |
关键词[WOS] | FIELD-EFFECT TRANSISTORS ; CARBON ; RESISTANCE ; DEVICES |
收录类别 | SCI |
语种 | 英语 |
WOS研究方向 | Materials Science ; Metallurgy & Metallurgical Engineering |
WOS类目 | Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering |
WOS记录号 | WOS:000396353000012 |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.hfcas.ac.cn:8080/handle/334002/31793 |
专题 | 中科院安徽光学精密机械研究所 |
作者单位 | 1.Temple Univ, Dept Phys, Philadelphia, PA 19122 USA 2.Temple Univ, Dept Elect & Comp Engn, Philadelphia, PA 19122 USA 3.Minzu Univ China, Coll Sci, Beijing 100044, Peoples R China 4.Chinese Acad Sci, Anhui Inst Opt & Fine Mech, Anhui Prov Key Lab Photon Devices & Mat, Hefei 230031, Peoples R China |
推荐引用方式 GB/T 7714 | Feng, Ying,Trainer, Daniel J.,Peng, Hongshang,et al. Safe growth of graphene from non-flammable gas mixtures via chemical vapor deposition[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2017,33(3):285-290. |
APA | Feng, Ying,Trainer, Daniel J.,Peng, Hongshang,Liu, Ye,&Chen, Ke.(2017).Safe growth of graphene from non-flammable gas mixtures via chemical vapor deposition.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,33(3),285-290. |
MLA | Feng, Ying,et al."Safe growth of graphene from non-flammable gas mixtures via chemical vapor deposition".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 33.3(2017):285-290. |
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