HFCAS OpenIR  > 中科院安徽光学精密机械研究所
Micro-Machined Optical Fiber Side-Cantilevers for Acceleration Measurement
Li, J.1; Wang, G. Y.1; Sun, J. N.2; Maier, R. R. J.2; Macpherson, W. N.2; Hand, D. P.2; Dong, F. Z.1
2017-11-01
Source PublicationIEEE PHOTONICS TECHNOLOGY LETTERS
Volume29Issue:21Pages:1836-1839
AbstractWe propose an accelerometer based on a micro-cantilever fabricated onto the side of a single mode optical fiber using a combination of ps-laser machining and focused ion beam (FIB) processing. FIB machining is also used to fabricate a 45 degrees mirror onto the end of the fiber that is accurately aligned with optical fiber core. This provides a reliable means to optically address components attached to the side of the fiber, such as the cantilever. Using interferometry to accurately monitor the deflection of the side cantilever results in a device that is capable of measuring two-axis acceleration. Acceleration up to 6 g is measured with a resolution of similar to 0.01 g and a frequency range from dc to 500 Hz has been demonstrated. The cross-axis sensitivity is below -32 dB.
SubtypeArticle
KeywordOptical Fabrication Fiber Optics Sensors Fabry-perot
WOS HeadingsScience & Technology ; Technology ; Physical Sciences
Funding OrganizationInnovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1)
DOI10.1109/LPT.2017.2753279
WOS KeywordFABRY-PEROT CAVITIES ; SENSING APPLICATIONS ; TOP CANTILEVERS ; ACCELEROMETER ; DESIGN ; TEMPERATURE ; FABRICATION ; PRESSURE ; SENSORS ; SYSTEMS
Indexed BySCI
Language英语
Funding OrganizationInnovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1) ; Innovative Manufacturing Research Centre, UK under EPSRC(EP/F02553X/1)
WOS Research AreaEngineering ; Optics ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Optics ; Physics, Applied
WOS IDWOS:000413028100020
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.hfcas.ac.cn:8080/handle/334002/33788
Collection中科院安徽光学精密机械研究所
Affiliation1.Chinese Acad Sci, Anhui Inst Opt & Fine Mech, Hefei 230031, Anhui, Peoples R China
2.Heriot Watt Univ, Sch Engn & Phys Sci, Edinburgh EH14 4AS, Midlothian, Scotland
Recommended Citation
GB/T 7714
Li, J.,Wang, G. Y.,Sun, J. N.,et al. Micro-Machined Optical Fiber Side-Cantilevers for Acceleration Measurement[J]. IEEE PHOTONICS TECHNOLOGY LETTERS,2017,29(21):1836-1839.
APA Li, J..,Wang, G. Y..,Sun, J. N..,Maier, R. R. J..,Macpherson, W. N..,...&Dong, F. Z..(2017).Micro-Machined Optical Fiber Side-Cantilevers for Acceleration Measurement.IEEE PHOTONICS TECHNOLOGY LETTERS,29(21),1836-1839.
MLA Li, J.,et al."Micro-Machined Optical Fiber Side-Cantilevers for Acceleration Measurement".IEEE PHOTONICS TECHNOLOGY LETTERS 29.21(2017):1836-1839.
Files in This Item: Download All
File Name/Size DocType Version Access License
Micro-Machined Optic(869KB)期刊论文作者接受稿开放获取CC BY-NC-SAView Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Li, J.]'s Articles
[Wang, G. Y.]'s Articles
[Sun, J. N.]'s Articles
Baidu academic
Similar articles in Baidu academic
[Li, J.]'s Articles
[Wang, G. Y.]'s Articles
[Sun, J. N.]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Li, J.]'s Articles
[Wang, G. Y.]'s Articles
[Sun, J. N.]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: Micro-Machined Optical Fiber Side-Cantilevers for Acceleration Measurement.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.