Atomic-Oxygen  Beam Source with Compact ECR Plasma

HFCAS OpenIR

	Atomic-Oxygen Beam Source with Compact ECR Plasma
其他题名	Atomic-Oxygen Beam Source with Compact ECR Plasma
	Ren Zhaoxing 1; Shen Keming 1; Lu Qingao 1
	2002
发表期刊	等离子体科学和技术：英文版
ISSN	1009-0630
摘要	An atomic-Oxygen beam source with compact ECR plasma was succesfully investigated.the microwave was produced and transmitted in a coaxial mode,and coupled with the loop ,The plasma was produced as a higher asymmetry magnetic mirror field,and neutralized with the molybdenum target at a lower asymmetry magnetic mirror field.The magnetic field was constituted with permanent magnets.this source has a higher flux density of stom beam, a lower operating pressure ,a smaller power consumption and low-cost.When it was installed at the equipment to study the interaction of the beam with the surface,the operation was carried out very easily and with a good stability.
其他摘要	An atomic-oxygen beam source with compact ECR plasma was successfully inves-tigated. The microwave was produced and transmitted in a coaxial mode, and coupled with the loop. The plasma was produced at a higher asymmetry magnetic mirror Field, and neutralized with the molybdenum target at a lower asymmetry magnetic mirror field. The magnetic field was constituted with permanent magnets. This source has a higher flux density of atom beam, a lower operating pressure, a smaller power consumption and low-cost. When it was installed at the equipment to study the interaction of the beam with the surface, the operation was carried out very easily and with a good stability.
关键词	原子氧等离子体源等离子体束 ECR 电子回旋加速器产生稳定性
收录类别	CSCD
语种	中文
CSCD记录号	CSCD:1363257
引用统计
文献类型	期刊论文
条目标识符	http://ir.hfcas.ac.cn:8080/handle/334002/51514
专题	中国科学院合肥物质科学研究院
作者单位	1.Institute of Plasma Physics, Chinese Academy of Sciences 2.Institute of Plasma Physics, Chinese Academy of Sciences 3.Institute of Plasma Physics, Chinese Academy of Sciences
推荐引用方式 GB/T 7714	Ren Zhaoxing,Shen Keming,Lu Qingao. Atomic-Oxygen Beam Source with Compact ECR Plasma[J]. 等离子体科学和技术：英文版,2002,004.
APA	Ren Zhaoxing,Shen Keming,&Lu Qingao.(2002).Atomic-Oxygen Beam Source with Compact ECR Plasma.等离子体科学和技术：英文版,004.
MLA	Ren Zhaoxing,et al."Atomic-Oxygen Beam Source with Compact ECR Plasma".等离子体科学和技术：英文版 004(2002).