Knowledge Management System of Hefei Institute of Physical Science,CAS
The effect of Y2O3 addition on He desorption behavior and He bubble evolution in He-charged W-Y2O3 film | |
Wang, Le1,4; Hao, Ting1; Zhao, Bang-Lei1,2; Liu, Rui1; Fang, Qian-Feng1; Liu, Chang-Song1; Wang, Xian-Ping1; Cao, Lei3; Chen, Jun-Ling3 | |
2020-09-01 | |
发表期刊 | THIN SOLID FILMS |
ISSN | 0040-6090 |
通讯作者 | Hao, Ting(hao.ting@issp.ac.cn) |
摘要 | He-charged W films and He-charged W-Y2O3 films have been fabricated by RF magnetron sputtering in a mixed atmosphere of He and Ar. The growth mechanism of He bubbles/blisters in He-charged W/W-Y(2)O(3)3 films was investigated by the isochronal annealing at different temperatures (773 K, 973 K, and 1273 K, respectively). Compared with the case of He-charged W film without Y2O3 addition, Y(2)O(3 )addition restrain obviously He blistering in He-charged W-Y2O3 film. It seems that the addition of Y2O3 can inhibit in some extent the growth of He bubbles in W-Y2O3 film according to transmission electron microscopy observations. Thermal desorption spectroscopy analysis indicates that there are five He desorption peaks within the range of 1273 K in both the asdeposited He-charged W/W-Y2O3 films, and it exists as well as an inhibiting effect of Y2O3 addition on the entrapping or de-trapping of He atoms in W-Y2O3 film. |
关键词 | He bubbles Helium-charged tungsten film Thermal desorption Thin film Magnetron sputtering Yttrium oxide |
DOI | 10.1016/j.tsf.2020.138184 |
关键词[WOS] | THERMAL-DESORPTION ; HELIUM ; TUNGSTEN ; COMPOSITES ; IRRADIATION |
收录类别 | SCI |
语种 | 英语 |
资助项目 | National Key R&D Program of China[2017YFE0300403] ; National Natural Science Foundation of China[11775255] ; National Natural Science Foundation of China[5171181] ; National Natural Science Foundation of China[11374299] ; National Natural Science Foundation of China[11575231] ; National Natural Science Foundation of China[11674319] ; National Natural Science Foundation of China[51771184] |
项目资助者 | National Key R&D Program of China ; National Natural Science Foundation of China |
WOS研究方向 | Materials Science ; Physics |
WOS类目 | Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
WOS记录号 | WOS:000561800500014 |
出版者 | ELSEVIER SCIENCE SA |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.hfcas.ac.cn:8080/handle/334002/70515 |
专题 | 中国科学院合肥物质科学研究院 |
通讯作者 | Hao, Ting |
作者单位 | 1.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Hefei 230031, Peoples R China 2.Univ Sci & Technol China, Hefei 230026, Peoples R China 3.Chinese Acad Sci ASIPP, Inst Plasma Phys, POB 1126, Hefei 230031, Peoples R China 4.Beijing Inst Technol, Chongqing Innovat Ctr, Chongqing 401135, Peoples R China |
推荐引用方式 GB/T 7714 | Wang, Le,Hao, Ting,Zhao, Bang-Lei,et al. The effect of Y2O3 addition on He desorption behavior and He bubble evolution in He-charged W-Y2O3 film[J]. THIN SOLID FILMS,2020,709. |
APA | Wang, Le.,Hao, Ting.,Zhao, Bang-Lei.,Liu, Rui.,Fang, Qian-Feng.,...&Chen, Jun-Ling.(2020).The effect of Y2O3 addition on He desorption behavior and He bubble evolution in He-charged W-Y2O3 film.THIN SOLID FILMS,709. |
MLA | Wang, Le,et al."The effect of Y2O3 addition on He desorption behavior and He bubble evolution in He-charged W-Y2O3 film".THIN SOLID FILMS 709(2020). |
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