全固态高压脉冲电源在半导体光刻光源中的应用

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	全固态高压脉冲电源在半导体光刻光源中的应用
其他题名	Application of all-solid-state high-voltage pulse power supply in semiconductor lithography light source
	游利兵1 ; 程超 1; 方晓东1
	2019
发表期刊	强激光与粒子束
ISSN	1001-4322
摘要	简要回顾了半导体光刻的发展历程以及准分子激光作为光源在半导体光刻中的需求。简述了高压脉冲电源的基本原理及应用,介绍了全固态高压脉冲电源的结构和特点。着重阐述了全固态高压脉冲电源在光刻用准分子激光器和EUV光源中的应用。大功率半导体开关结合多级磁脉冲压缩开关的全固态脉冲电源有效替代传统基于闸流管的高压脉冲电源,实现了光刻光源高重复频率下的长寿命运行。介绍了中国科学院安徽光学精密机械研究所近十年来,在准分子激光器的全固态高压脉冲电源研究上的相关进展。最后,对未来半导体光刻光源对全固态脉冲电源的需求进行了展望。
其他摘要	The basic principle and application of high-voltage pulse power supply are briefly described, the principle and characteristics of all-solid-state high-voltage pulse power supply are introduced. The history of semiconductor lithography and the need for excimer lasers as light sources in semiconductor lithography are reviewed. The application of all-solid-state high-voltage pulse power supply in excimer laser for lithography is emphasized. The high-power semiconductor switch combined with multi-stage magnetic pulse compression switch is used to replace the traditional thyristor-based high-voltage pulse power supply, and a long life operation of the excimer laser at a high repetition rate is achieved. The progress of the research on the all-solid-state high-voltage pulse power supply of excimer lasers in the past ten years of Anhui Institute of Optics and Fine Mechanics of Chinese Academy of Sciences is also introduced. Finally, the future demand for all-solid-state pulsed power sources for semiconductor lithography sources is expected.
关键词	全固态高压脉冲电源半导体光刻准分子激光磁开关闸流管
收录类别	CSCD
语种	中文
CSCD记录号	CSCD:6475192
引用统计
文献类型	期刊论文
条目标识符	http://ir.hfcas.ac.cn:8080/handle/334002/95060
专题	中国科学院合肥物质科学研究院
作者单位	1.中国科学院安徽光学精密机械研究所 2.中国科学院安徽光学精密机械研究所 3.中国科学院安徽光学精密机械研究所
推荐引用方式 GB/T 7714	游利兵,程超,方晓东. 全固态高压脉冲电源在半导体光刻光源中的应用[J]. 强激光与粒子束,2019,031.
APA	游利兵,程超,&方晓东.(2019).全固态高压脉冲电源在半导体光刻光源中的应用.强激光与粒子束,031.
MLA	游利兵,et al."全固态高压脉冲电源在半导体光刻光源中的应用".强激光与粒子束 031(2019).