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Defects in hydrogen implanted SiC 期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2018, 卷号: 436, 页码: 107-111
Authors:  Zhang, Xiaodong;  Li, Qian;  Wang, Mao;  Zhang, Zhitao;  Akhmadaliev, Shavkat;  Zhou, Shengqiang;  Wu, Yiyong;  Guo, Bin
Favorite  |  View/Download:5/0  |  Submit date:2019/12/25
SiC  Defects  Ion implantation