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The application of a helicon plasma source in reactive sputter deposition of tungsten nitride thin films 期刊论文
Plasma Science and Technology, 2022, 卷号: 24
作者:  YANG,Yan;  JI,Peiyu;  LI,Maoyang;  YU,Yaowei;  HUANG,Jianjun;  YU,Bin;  WU,Xuemei;  HUANG,Tianyuan
收藏  |  浏览/下载：31/0  |  提交时间：2022/12/22
helicon wave plasma  reactive sputtering  tungsten nitride  plasma diagnosis  
Helicon-Wave-Excited Helium Plasma Performance and Wall-Conditioning Study on EAST 期刊论文
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2020, 卷号: 48
作者:  Huang, Tianyuan;  Jin, Chenggang;  Yu, Yaowei;  Hu, Jiansheng;  Yang, Jianhua;  Ding, Fang;  Chen, Xiahua;  Ji, Peiyu;  Qian, Jiawei;  Huang, Jianjun;  Yu, Bin;  Wu, Xuemei
收藏  |  浏览/下载：57/0  |  提交时间：2020/11/30
Helicon wave plasma (HWP)  tokamaks  wall conditioning  
Influence Mechanism of Cathode Materials on the Transition Process of Arc Modes in Drawn Vacuum Arcs Under External AMF 期刊论文
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2020, 卷号: 48
作者:  Huang, Tianyuan;  Jin, Chenggang;  Yu, Yaowei;  Hu, Jiansheng;  Yang, Jianhua;  Ding, Fang;  Chen, Xiahua;  Ji, Peiyu;  Qian, Jiawei;  Huang, Jianjun;  Yu, Bin;  Wu, Xuemei
收藏  |  浏览/下载：40/0  |  提交时间：2020/10/26
Cathodes  Vacuum arcs  Anodes  Iron  Surface waves  Current density  Arc mode  axial magnetic field  cathode materials  transition process  vacuum arc